Keithley 595 Quasistatic C-V Meter
The Keithley 595 Quasistatic C-V Meter is a specialized instrument designed for measuring quasistatic capacitance versus voltage (C-V) characteristics of Metal Insulator Semiconductor (MIS) devices. With its advanced C-V measurement technique, this meter provides essential diagnostics and corrections to minimize common sources of error, significantly enhancing the reliability and accuracy of test results.
Utilizing a sensitive picoammeter function, the Keithley 595 is capable of measuring direct current (DC) down to an impressive 1 femtoampere (fA). It features a built-in voltage source that supports ±20V, offering DC, staircase, and square wave waveforms. This versatility enables comprehensive current and quasistatic capacitance measurements at specific device biases or as functions of voltage, making it ideal for characterizing a wide range of semiconductor materials and components.
The Keithley 595 employs the innovative "feedback charge" technique for quasistatic C-V measurements. This method simplifies the process of capturing quasistatic C-V characteristics, especially for devices that are unsuitable for traditional ramp or static/Q-V measurement methodologies.
Key Features and Specifications:
- Measurement Range: Capacitance: 10 fF to 20 nF | DC Current: 1 fA to 200 µA
- Corrects capacitance measurements for background leakage currents, ensuring precise results.
- Ensures rapid stabilization of device equilibrium for accurate measurement outcomes.
- Superior signal-to-noise performance, optimized for the slow voltage sweeps required by advanced semiconductor devices.
