KEYSIGHT B1500A SEMICONDUCTOR DEVICE ANALYZER
The Keysight B1500A Semiconductor Device Analyzer is a cutting-edge modular instrument designed for advanced semiconductor characterization. With its ten-slot configuration, it adeptly supports both current-voltage (IV) and capacitance-voltage (CV) measurements, including rapid high-voltage pulsing. Its intuitive Microsoft® Windows® interface, coupled with Agilent’s EasyEXPERT software, streamlines the user experience by providing a task-oriented approach to device analysis, making it an essential tool for researchers and engineers in the semiconductor industry.
Key Features and Benefits:
- Exceptional Measurement Performance: Achieve unmatched IV measurement precision with up to 0.1 fA and 0.5 µV resolution, ideal for low-current applications.
- Flexible Measurement Options: Enjoy versatile measurement features, including single and multi-channel sweeps, time sampling, and quasi-static CV through SMUs.
- Advanced Capacitance Measurement: An optional integrated capacitance module supports CV measurements at frequencies up to 5 MHz, enhancing your analysis capabilities.
- Precision Positioning Solutions: Optional CV-IV switching solutions provide measurement resolution as precise as 0.1 fA and 0.5 µV for high accuracy.
- Automation Made Easy: Built-in semi-automatic wafer prober drivers allow for effortless test automation, utilizing the Quick Test mode for straightforward sequencing without programming.
- High-Voltage Capabilities: An optional high-voltage semiconductor pulse generator unit (HV-SPGU) offers programmable pulse widths of 10 ns and outputs up to ±40 V for comprehensive device testing.
- Fast Measurement Options: The waveform generator/fast measurement unit (WGFMU) enables fast current or voltage measurements along with arbitrary linear waveform generation (ALWG).
- Dedicated Testing Solutions: The 10 ns pulsed IV solution is specifically designed to characterize high-k gate dielectrics and silicon-on-insulator (SOI) transistors.
- User-Friendly Classic Test Mode: Experience familiar testing environments with the Classic Test mode, reflecting the interface of 4155/4156 systems while leveraging modern Windows® GUI features.
Key Specifications:
- General Features:
- PC-based instrument operating on Windows® XP Professional OS.
- Comprehensive solution covering IV, CV, pulse generation, fast IV, and time-domain measurements from a single platform.
- Ten module slots accommodating various source monitor units (SMUs) and additional module types (MFCMU, HV-SPGU, WGFMU).
- Desktop EasyEXPERT software for offline data analysis and application development.
- Measurement Capabilities:
- Supports IV measurements with precision down to 0.1 fA and 0.5 µV.
- Facilitates both quasi-static and medium-frequency CV measurements for in-depth analysis.
- Accurate fast IV and time-domain measurements catering to diverse applications like pulsed IV and NBTI measurements.
- High voltage pulse generation supporting voltage testing up to ±40 V for high power and memory device characterization.
Module Selection Guide:
| Module Main |
Slots |
Specification |
| B1510A HPSMU |
2 |
Up to 200V, 1A force. 10fA current resolution. |
| B1511A MPSMU |
1 |
Up to 100V, 100mA force. 10fA current resolution. |
| B1517A HRSMU |
1 |
Up to 100V, 100mA force. 1fA current resolution. |
| E5288A ASU |
NA |
Up to 100V, 100mA force. 100aA current resolution. |
| B1520A MFCMU |
1 |
1kHz to 5MHz, up to 100V DC bias with SMU. |
| B1525A HV-SPGU |
1 |
Min 12.5ns pulse width, 10ns transition time, up to 40V with 3 level pulsing. |
| B1530A WGFMU |
1 |
Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speed. |
