Phosphoric Acid, 85%, Electronic/Cleanroom Grade

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Manufactured by: Spectrum Chemical

Category: Inorganic Chemicals

Spectrum Chemical Phosphoric Acid, 85%, Electronic/Cleanroom Grade

Phosphoric Acid, 85%, Electronic/Cleanroom Grade

Experience superior performance in semiconductor processing with our high-quality Phosphoric Acid, 85%, Electronic Grade. This mineral acid, also known as orthophosphoric acid, stands out for its exceptional purity and low metals content, making it the ideal choice for etching solutions in demanding electronics applications.

Key Features and Specifications:

    • Chemical Formula: H3PO4
    • Chemical CAS Number: 7664-38-2
    • Chemical Formula Weight: F.W. 98.00
    • Concentration: 85 Percent
    • Application: Commonly used as a wet etching agent in compound semiconductor processing. Particularly effective when combined with hydrogen peroxide and water for selective etching of InGaAs relative to InP.

Chemical Specifications:

Assay (H3PO4) 85.0-87.0%
Color (APHA) 10
Volatile Acids 0.16 µeq/g
Insoluble Matter 50 ppm
Chloride (Cl) 3 ppm
Nitrate (NO3) 5 ppm
Sulfate (SO4) 20 ppm
Arsenic (As) 200 ppb
Particulate Count (?1.0 Micron) 25 particles/ml

Packaging and Safety:

    • Packaging: Packaged in a cleanroom environment.
    • Hazard Class: 8
    • DOT Description: Phosphoric acid solution
    • Packaging Group: PG III
    • UPS Limit: 4 L
    • Health Rating: 3

Chemical Hazard

Please handle with care due to the corrosive nature of Phosphoric Acid. Always follow appropriate safety protocols when working with this chemical.

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