Phosphoric Acid, 85%, Electronic/Cleanroom Grade
Experience superior performance in semiconductor processing with our high-quality Phosphoric Acid, 85%, Electronic Grade. This mineral acid, also known as orthophosphoric acid, stands out for its exceptional purity and low metals content, making it the ideal choice for etching solutions in demanding electronics applications.
Key Features and Specifications:
- Chemical CAS Number: 7664-38-2
- Chemical Formula Weight: F.W. 98.00
- Concentration: 85 Percent
- Application: Commonly used as a wet etching agent in compound semiconductor processing. Particularly effective when combined with hydrogen peroxide and water for selective etching of InGaAs relative to InP.
Chemical Specifications:
Assay (H3PO4) |
85.0-87.0% |
Color (APHA) |
10 |
Volatile Acids |
0.16 µeq/g |
Insoluble Matter |
50 ppm |
Chloride (Cl) |
3 ppm |
Nitrate (NO3) |
5 ppm |
Sulfate (SO4) |
20 ppm |
Arsenic (As) |
200 ppb |
Particulate Count (?1.0 Micron) |
25 particles/ml |
Packaging and Safety:
- Packaging: Packaged in a cleanroom environment.
- DOT Description: Phosphoric acid solution
Chemical Hazard
Please handle with care due to the corrosive nature of Phosphoric Acid. Always follow appropriate safety protocols when working with this chemical.